Scanning tunneling microscope(STM) for an advanced device processes.
نویسندگان
چکیده
منابع مشابه
Scanning Tunneling Microscopy
The invention of the scanning tunneling microscope was a singularity event in the field of surface science and condensed matter physics. The ability to visualize individual atoms in an atomic structure was a huge step forward in experimental development, one for which the inventors were awarded the Nobel Prize in Physics in 1986. While a groundbreaking development, the Scanning Tunneling Micros...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1989
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.32.608